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Atonarp Process Control Mass Spectrometer Aston ™
Atonarp Process Control Mass Spectrometer Aston, ye luui në teknoloji de molecular sensing, ye ALD, CVD, etching, ALE ku jɔl ya gas detection analysis
Detalji proizvoda

Atonarp Process Control Mass Spectrometer Aston ™ Teknoloji:

Tools universal for real-time process control, corrosion resistant gases, anti-condensation (Tools universal for real-time process control, corrosion resistant gases, anti-condensation) (Tools universal for real-time process control, corrosion resistant gases, anti-condensation)
Molecular analysis in situ platform for semiconductor manufacturing, providing real-time, actionable data (Molecular analysis in situ platform for semiconductor manufacturing, providing real-time, actionable data) (Molecular analysis in situ platform for semiconductor manufacturing, providing real-time, actionable data)
Plasma ionization source, no filament, and more durable
A lëu bï ya mat kɛ toolbar juëc ye looi
Aston ™ Proses Mass Spectrum AnalyzerA ye tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛm

Aston ™ Proses Mass Spectrum AnalyzerParameters teknis

Yaa

Impact-300

Impact-300DP

Plasma-200

Plasma-200DP

Plasma-300

Plasma-300DP

Model

AST3007

AST3006

AST3005

AST3004

AST3003

AST3002

Kualitas separation

4 bar

Sistɛm vacuum

Molekul Pump

Molekul Pump
Pump diaphragm

Molekul Pump

Molekul Pump
Pump diaphragm

Molekul Pump

Molekul Pump
Pump diaphragm

Detektor

FC /SEM

Kualitas Range

2-285

2-220

2-285

Resolution

0.8±0.2

Limit de deteksyon

0.1 PPM

Temperature de luɔi

15-35“℃

Puwol

350 W

Weight ye

15 kg

Size

299 x 218 x 331 LxWxH(mm)

400 x 240 x 325 LxWxH(mm)

Atonarp Aston Lɔ̈ɔ̈i: Lɔ̈ɔ̈i kɔ̈k në luɔɔi de semiconductor process control ku optimization, ka luɔɔi, luɔɔi ku luɔɔi de semiconductor manufacturing process juak
Aston ™ A ye kë ye cɔl compact online mass spectrometer ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer" ye cɔl "mass spectrometer".
CVD / ALD: Oxide-Nitride Transition and Composition Analysis (Oxide-Nitride Transition and Composition Analysis)
Etch/ALE End Point :<0.3%
Chamber Matching: molekul ye tïŋ
Aston™ 半导体在线质谱仪应用

Na yïn wïc ba ŋic wɛɛrAtonarp Aston ™ Mass spectrometer onlineWël kɔ̈k peei wala wël kɔ̈k peei, tïŋ wël kɔ̈k peei:
Shanghai Betong: Miss Ye Taiwan Betong: Miss Wang
T: +86-21-5046-3511 ext 109 T: +886-3-567-9508 ext 161
F: +86-21-5046-1490 F: +886-3-567-0049
M: +86 1391-883-7267 (微信同号) M: +886-939-653-958

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